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A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process.
Adel Merdassi
Peng Yang
Vamsy P. Chodavarapu
Published in:
Sensors (2015)
Keyphrases
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real time
data sets
integrated circuit
neural network
real world
social networks
computer vision
website
data structure
evolutionary algorithm
motion estimation
higher level
process model
lower level