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Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method.
Jong-Seok Kim
Sang-Woo Lee
Kyu-Dong Jung
Woon-Bae Kim
Sung-Hoon Choa
Byeong-Kwon Ju
Published in:
Microelectron. Reliab. (2008)
Keyphrases
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high precision
high accuracy
detection algorithm
clustering method
detection method
wide range
significant improvement
cost function
dynamic programming
synthetic data
image sequences
preprocessing
support vector machine svm
quality measures