Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor.
Florian BartoliM. MoutaouekkilJérémy StrequePhilippe PigeatSami Hage-AliPascal BouletHamid M'JahedOmar ElmazriaSergei ZhgoonThierry AubertOlivier Bou MatarAbdelkrim TalbiPublished in: IEEE SENSORS (2017)