Review of MEMS metrology solutions.

James F. Nichols Meghan Shilling Thomas R. Kurfess

Published in: Int. J. Manuf. Technol. Manag. (2008)

Keyphrases

data mining
data sets
neural network
image processing
optimal solution
artificial neural networks
viewpoint
control system
special case
probabilistic model
d objects
efficient solutions
similar problems