On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors.
Deepak R. SahooWalter HäberlePeter BächtoldAbu SebastianHaralampos PozidisEvangelos EleftheriouPublished in: ACC (2008)
Keyphrases
- sensor networks
- sensor fusion
- real time
- sensing devices
- infrared
- data acquisition
- sensor data
- selective perception
- body sensor networks
- data fusion
- power plant
- image sensor
- multi sensor
- micro controller
- low cost sensors
- infrared sensors
- weather forecasts
- wearable sensors
- sensor technology
- model based diagnosis
- wireless sensor networks