Model of Capacitive Micromechanical Accelerometer Including Effect of Squeezed Gas Film.

Timo Veijola Tapani Ryhänen

Published in: ISCAS (1995)

Keyphrases

computational model
parameter estimation
formal model
probabilistic model
theoretical analysis
prediction model
experimental data
theoretical framework
database
cost function
prior knowledge
objective function
multiscale
high level
conceptual model
simulation model
knowledge base
machine learning