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Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement.
Richard Hudeczek
Peter Baumgartner
Published in:
ESSDERC (2021)
Keyphrases
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back end
user friendly
data management
data types
building blocks
version control
detailed design
low cost
power supply
database
anisotropic diffusion
line segments
analog to digital converter
circuit design
power consumption
hough transform
database systems
real world
data sets