Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic.
Kyungsu ParkJames R. MorrisonPublished in: IEEE Trans Autom. Sci. Eng. (2015)
Keyphrases
- integrated circuit
- scheduling jobs
- scheduling problem
- manufacturing cell
- batch processing
- single machine
- list scheduling
- job shop scheduling problem
- job shop
- release dates
- worst case performance ratio
- job scheduling
- maximum lateness
- identical machines
- information systems
- massively parallel
- manufacturing systems
- resource allocation
- simulated annealing
- search algorithm