Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note).
Samuel G. WebsterMatthias K. GobbertJean-François RemacleTimothy S. CalePublished in: Euro-Par (2002)
Keyphrases
- numerical solution
- differential equations
- partial differential equations
- nonlinear equations
- finite difference
- numerical methods
- boundary value problem
- finite element
- ordinary differential equations
- multi layer
- difference equations
- finite element method
- exact solution
- thin film
- dynamical systems
- neural network
- linear systems
- multiresolution
- multiscale