Modeling of chemical mechanical polishing process using FEM and abductive network.

Yeou-Yih Lin Ship-Peng Lo

Published in: Eng. Appl. Artif. Intell. (2005)

Keyphrases

finite element
knowledge base
domain knowledge
knowledge representation
peer to peer
process model
neural network
data mining
genetic algorithm
mobile devices
medical images
network structure
complex networks
computer networks
finite element model
physical processes