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Characterization of a Tilted-beam Piezoresistive MEMS Sensor with Current-drive Readout Circuit.

Nastaran NikooienejadMohammad MaroufiS. O. Reza Moheimani
Published in: ACC (2019)
Keyphrases
  • high speed
  • multi sensor
  • low voltage
  • short circuit
  • real time
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  • expert systems
  • relational databases
  • high resolution
  • circuit design
  • analog vlsi