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Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system.

Huai ZhangZhibin JiangChengtao Guo
Published in: SMC (2007)
Keyphrases
  • manufacturing systems
  • dynamic programming
  • flexible manufacturing systems
  • cost function
  • real time
  • image understanding
  • control strategy
  • control method
  • process control