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Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor.
Wenhan Chang
Lingmeng Yang
Zhezheng Zhu
Zhenchuan Yang
Yilong Hao
Chengchen Gao
Published in:
Sensors (2021)
Keyphrases
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optimal design
real time
high sensitivity
sensitivity analysis
design space
case study
optical flow
control system
sensor networks
particle swarm optimization
optimization algorithm
design process
infrared
sensor data
global optimization
source localization