Lowering Variability in Transport Times by Scheduling Conveyor-Based AMHS in Wafer Fabs.

Clemens Schwenke Klaus Kabitzsch

Published in: INDIN (2018)

Keyphrases

wafer fabrication
scheduling problem
scheduling algorithm
integrated circuit
semiconductor manufacturing
resource constraints
flow control
face recognition
orders of magnitude
resource allocation
software product line
software engineering
multiple objectives
round robin
batch processing
computational grids