An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation.

Yimai Peng Seokhyeon Jeong Kyojin Choo Yejoong Kim Li-Yu Chen Rohit Rothe Li Xu Ilya Gurin Omid Oliaei Matthew J. Thompson Stephen Bart Peter Hartwell David T. Blaauw Dennis Sylvester

Published in: IEEE J. Solid State Circuits (2024)

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