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Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers.
Yanjun Lu
ChunRong Pan
Yan Qiao
Naiqi Wu
Yufeng Chen
Published in:
ICNSC (2018)
Keyphrases
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real time
integrated circuit
data processing
clustering algorithm
data sets
databases
digital libraries
building blocks
semiconductor manufacturing
data clustering
information processing
decision support
end users
relational databases
decision making
genetic algorithm
neural network