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Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer.

Minoru SasakiMasahiro IshimoriJongHyeong SongKazuhiro Hane
Published in: IEICE Trans. Electron. (2007)
Keyphrases
  • integrated circuit
  • car navigation
  • semiconductor manufacturing
  • shape representation
  • massively parallel
  • autonomous driving
  • degrees of freedom
  • data sets
  • similarity measure
  • portable devices