Prospective development in diffusion barrier layers for copper metallization in LSI.

H. Y. Wong N. F. Mohd Shukor Nowshad Amin

Published in: Microelectron. J. (2007)

Keyphrases

latent semantic indexing
case study
diffusion process
diffusion processes
software engineering
information processing
st century
artificial intelligence
decision support
steady state
design principles