Login / Signup

Feedback control of thin film growth in an HPCVD reactor via reduced order models.

H. T. BanksS. C. BeelerGrace M. KeplerHien T. Tran
Published in: CDC (2001)
Keyphrases
  • feedback control
  • thin film
  • reduced order
  • optimal control
  • closed loop
  • data mining
  • artificial neural networks