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A film bulk acoustic resonator pressure sensor based on lateral field excitation.
Shujing Su
Zihui Geng
Xiaoxin Ma
Qiulin Tan
Jijun Xiong
Published in:
Int. J. Distributed Sens. Networks (2018)
Keyphrases
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permalloy films
data sets
information retrieval
genetic algorithm
artificial intelligence
similarity measure
multiscale
multi agent
expert systems
sensor networks
sensor data
acoustic signal
motion picture