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An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing.
Chen-Fu Chien
Kuo-Hao Chang
Wen-Chih Wang
Published in:
J. Intell. Manuf. (2014)
Keyphrases
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data mining
semiconductor manufacturing
case study
knowledge based systems
design process
decision trees
data analysis
association rules
machine learning
building blocks
data mining methods
design methodology