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Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology.
Peng Qu
Hongwei Qu
Published in:
Sensors (2013)
Keyphrases
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case study
design process
software architecture
design methodology
user interface
high speed
computer aided
engineering design
human factors
analog to digital converter
information systems
expert systems
data processing
key technologies
active participation