Login / Signup
Intelligent Scheduling Methods for Challenges of Cluster Tools with Concurrent Processing of Multiple Wafer Types.
Jinchao Fu
Chunrong Pan
Wenqing Xiong
Published in:
CASE (2020)
Keyphrases
</>
computational cost
benchmark datasets
real time
machine learning
information retrieval
feature selection
preprocessing
significant improvement
scheduling problem
empirical studies
resource allocation
statistical methods