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Influence of target-target distance for composition distribution in new facing targets sputtering.

Takuya MaetaniYutaka NakamitsuJunpei SakuraiSeiichi Hata
Published in: MHS (2014)
Keyphrases
  • target tracking
  • target detection
  • multiple targets
  • moving target
  • information systems
  • target recognition
  • multi target
  • neural network
  • data mining
  • genetic algorithm
  • case study
  • probability distribution