Universal Deoxidation of Semiconductor Substrates Assisted by Machine-Learning and Real-Time-Feedback-Control.
Chao ShenWenkang ZhanJian TangZhaofeng WuBo XuChao ZhaoZhanguo WangPublished in: CoRR (2023)
Keyphrases
- feedback control
- real time
- machine learning
- closed loop
- adaptive control
- optimal control
- open loop
- fractional order
- control system
- learning algorithm
- inverted pendulum
- machine learning methods
- linear time invariant
- machine learning algorithms
- feedback controller
- vision system
- feature selection
- data mining
- neural network
- control scheme
- computational intelligence
- computer vision