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Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment.
J. Wang
Y. Huang
W. G. Wu
Y. L. Hao
Published in:
NEMS (2010)
Keyphrases
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three dimensional
mobile robot
real time
viewpoint
d objects
dynamic environments
virtual world
mathematical model
sensor networks
autonomous agents
embedded systems
free form
control software