Improved Lithographic Accuracy Using Image Registration Technology.
Qiang WangGuohua PengJing YangPublished in: ISCID (2) (2011)
Keyphrases
- image registration
- high accuracy
- computational cost
- neural network
- registration accuracy
- case study
- classification accuracy
- computational efficiency
- key technologies
- rapid development
- data processing
- prediction accuracy
- mutual information
- cost effective
- high precision
- affine transformation
- personal computer
- input image
- similarity measure
- image alignment
- computer vision