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Fuzzy Few-Shot Learning for Predictive Maintenance and Cost-Benefit Analysis in Semiconductor Manufacturing: A Case Study on Photomask Haze.
Hao-Hsuan Huang
Yun-Hsun Huang
Published in:
IEEE Access (2024)
Keyphrases
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learning process
semiconductor manufacturing
learning algorithm
supervised learning
fuzzy sets
learning systems
artificial intelligence
active learning
fuzzy logic
cost benefit analysis
knowledge base
reinforcement learning
video sequences