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Modeling methodology: simulation based cause and effect analysis of cycle time and WIP in semiconductor wafer fabrication.
Chao Qi
Tuck Keat Tang
Appa Iyer Sivakumar
Published in:
WSC (2002)
Keyphrases
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wafer fabrication
neural network
data sets
data analysis
statistical analysis
design methodology
real time
genetic algorithm
scheduling problem
quantitative analysis
modeling framework
structural analysis
colored petri nets