Login / Signup

Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film.

Yushuai LiuZhiyuan GaoKangfu LiuTao Wu
Published in: NEMS (2021)
Keyphrases
  • thin film
  • case study
  • machine learning
  • high resolution
  • design process
  • mathematical model