Transferring Optical Proximity Correction (OPC) Effect into Optical Mode.

Jianliang Li Qiliang Yan Lawrence S. Melvin III

Published in: ISQED (2007)

Keyphrases

waveguide
closely spaced
data mining
case study
three dimensional
solid state
feature selection
multiscale
computational complexity
artificial neural networks
active learning
intrusion detection
image acquisition
fiber optic
optical imaging
optical properties