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Measurement and analysis of contact plug resistance variability.

Karthik BalakrishnanDuane S. Boning
Published in: CICC (2009)
Keyphrases
  • statistical analysis
  • data acquisition
  • quantitative analysis
  • three dimensional
  • neural network
  • information systems
  • multi agent systems
  • artificial neural networks
  • multiresolution
  • automatic analysis