Integration scheme for 3D NAND with nonreplacement word line and its cell characteristics investigation.
Liu JiangChang Seok KangAshish PalEl Mehdi BaziziTomohiko KitajimaNancy FungGabriela AlvaAmy ChildBhaskar BhuyanTakehito KoshizawaSung-Kwan KangGill LeeDavid HwangBlessy AlexanderBuvna AyyagariPublished in: IMW (2021)