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Low stress TAN thin film Development for MEMS/Sensor electrode Application.

Xiaoxu KangQingyun ZuoChao YuanShoumian ChenYuhang Zhao
Published in: J. Circuits Syst. Comput. (2013)
Keyphrases
  • thin film
  • machine learning
  • development process
  • sensor data
  • high sensitivity
  • databases
  • sensor networks
  • software engineering
  • shape from shading