Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools.
Qinghua ZhuYan QiaoMengChu ZhouPublished in: CASE (2015)
Keyphrases
- petri net
- colored petri nets
- stochastic petri net
- embedded real time systems
- discrete event systems
- petri net model
- manufacturing systems
- clustering algorithm
- sequence diagrams
- ims ld
- web service composition
- scheduling problem
- reactive systems
- cluster analysis
- neural network
- high level petri nets
- concurrent systems
- fuzzy petri net
- story generation
- service composition
- business processes
- information processing
- computational intelligence
- high dimensional
- web services
- e learning
- decision making