A Virtual Metrology System for Predicting End-of-Line Electrical Properties Using a MANCOVA Model With Tools Clustering.
Tian-Hong PanBi-Qi ShengDavid Shan-Hill WongShi-Shang JangPublished in: IEEE Trans. Ind. Informatics (2011)
Keyphrases
- computational model
- formal model
- high level
- parameter estimation
- management system
- em algorithm
- theoretical analysis
- probability distribution
- multi view
- maximum likelihood
- unsupervised learning
- k means
- clustering method
- bayesian networks
- self organizing maps
- mathematical model
- statistical model
- spectral clustering
- neural network