Virtual Metrology Technique for Semiconductor Manufacturing.

Yaw-Jen Chang Yuan Kang Chin-Liang Hsu Chi-Tim Chang Tat Yan Chan

Published in: IJCNN (2006)

Keyphrases

semiconductor manufacturing
process control
discrete event simulation
augmented reality
production system
virtual environment
virtual reality
virtual world
camera calibration
control system
data sets
decision making
artificial intelligence
neural network
digital libraries
multi agent
genetic algorithm
data mining