A Novel Chamber Scheduling Method in Etching Tools Using Adaptive Neural Networks.
Hua XuPeifa JiaXuegong ZhangPublished in: ISNN (3) (2005)
Keyphrases
- neural network
- synthetic data
- clustering method
- experimental evaluation
- detection method
- significant improvement
- cost function
- computational cost
- classification accuracy
- statistical methods
- high precision
- classification method
- support vector machine svm
- fuzzy logic
- dynamic programming
- prior knowledge
- pairwise
- computational complexity
- data sets
- response time
- input data
- detection algorithm
- pattern recognition
- similarity measure
- genetic algorithm
- radial basis function
- neural network model