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Anomalous gate oxide conduction on isolation edges: analysis and process optimization.
Andrea Ghetti
D. Brazzelli
A. Benvenuti
G. Ghidini
Alessia Pavan
Published in:
Microelectron. Reliab. (2003)
Keyphrases
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optimization process
global optimization
data sets
data analysis
image analysis
statistical analysis
optimization algorithm
optimization problems