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Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning.
Mingsheng Cao
Yumeng Bo
Huibin Gao
Published in:
IEEE Access (2020)
Keyphrases
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disturbance rejection
feed forward
parameter tuning
control system
adaptive neural
fuzzy logic controller
particle swarm optimization
back propagation
control strategy
real time