Login / Signup

Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning.

Mingsheng CaoYumeng BoHuibin Gao
Published in: IEEE Access (2020)
Keyphrases
  • disturbance rejection
  • feed forward
  • parameter tuning
  • control system
  • adaptive neural
  • fuzzy logic controller
  • particle swarm optimization
  • back propagation
  • control strategy
  • real time