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Capacity planning for semiconductor wafer fabrication with time constraints between operations.

Jennifer K. RobinsonRichard Giglio
Published in: WSC (1999)
Keyphrases
  • wafer fabrication
  • capacity planning
  • stochastic programming
  • supply chain
  • supply chain management
  • capacity expansion
  • constraint programming
  • planning process
  • low cost
  • access control