A Review on Control Strategies of Batch Processing Machines in Semiconductor Manufacturing.

Pyung-Hoi Koo Dug Hee Moon

Published in: MIM (2013)

Keyphrases

control strategies
semiconductor manufacturing
control system
process control
control strategy
discrete event simulation
batch processing machines
traffic management
reinforcement learning
genetic algorithm
production system
search algorithm
evolutionary algorithm
upper bound
steady state
mathematical models