Petri net modeling and performance analysis of cluster tools with chamber revisiting.
Wlodek M. ZuberekPublished in: ETFA (2) (2001)
Keyphrases
- petri net
- colored petri nets
- stochastic petri net
- embedded real time systems
- petri net model
- manufacturing systems
- sequence diagrams
- ims ld
- high level petri nets
- discrete event systems
- fuzzy petri net
- service composition
- process model
- reactive systems
- concurrent systems
- web service composition
- clustering algorithm
- dynamic behaviors