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Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications.

Fenglian YuanQingling ZhaoBo HuangChunrong Pan
Published in: J. Syst. Archit. (2023)
Keyphrases
  • clustering algorithm
  • wafer fabrication
  • scheduling algorithm
  • cluster analysis
  • round robin
  • scheduling problem
  • data clustering
  • hierarchical clustering
  • integrated circuit
  • precedence constraints