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SiGe BiCMOS Technology with Embedded Microchannels based on Cu Pillar PCB Integration Enabling sub-THz Microfluidic Sensor Applications.
Emre Can Durmaz
Carl Heine
Zhibo Cao
Jens Lehmann
Dietmar Kissinger
Matthias Wietstruck
Published in:
3DIC (2023)
Keyphrases
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sensor technology
rapid development
micro controller
case study
sensor data
cost effective
data sets
key technologies
data processing
personal computer
embedded systems
image sensor
printed circuit boards
mechanical properties
solar cell
real time
heterogeneous platforms