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Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model.

Yin WanDing LiuJun-Chao RenShi-Hai Wu
Published in: Sensors (2023)
Keyphrases
  • soft sensor
  • predictive control
  • multiple models
  • experimental data
  • knowledge discovery
  • management system
  • mathematical model
  • control strategy
  • linear model
  • power plant
  • control parameters