Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime.
Boris A. BoomAlessandro BertoliniEric HennesJo F. J. van den BrandPublished in: Sensors (2021)
Keyphrases
- flow rate
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- control strategy
- dynamic model
- flow field
- fractional order
- open loop
- molecular structure
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