Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System.
Huai ZhangZhibin JiangHongtao HuPublished in: CASE (2007)
Keyphrases
- multi criteria
- wafer fabrication
- dynamic scheduling
- decision makers
- imprecise information
- flexible manufacturing systems
- process planning
- decision making
- multi objective
- multi attribute
- fuzzy topsis
- group decision making
- fuzzy logic
- multi criteria optimization
- fuzzy numbers
- multi criteria decision making
- grid services
- real time
- manufacturing systems
- conceptual framework
- similarity search
- cloud computing
- computer vision