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Stochastic Modeling and Local CD Uniformity Comparison between Negative Metal-Based, Negative- and Positive-Tone Development EUV Resists.
Itaru Kamohara
Ulrich Welling
Ulrich Klostermann
Wolfgang Demmerle
Published in:
IEICE Trans. Electron. (2022)
Keyphrases
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positive and negative
knowledge based systems
positive data
case study
positive or negative
neural network
information processing
positive examples
negative examples
three dimensional
training data
digital libraries