Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation.
Sumit Kumar JindalM. Aditya VarmaDeepali ThukralPublished in: Microelectron. J. (2018)
Keyphrases
- numerical simulations
- sensor networks
- sensor fusion
- theoretical analysis
- real time
- sensor data
- image sensor
- micro controller
- data acquisition
- sensing devices
- finite element method
- wearable sensors
- sensing modalities
- video camera
- simulation data
- temperature field
- numerical calculation
- mobile sensor
- multi sensor
- data management
- denoising